Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability

This research introduces a closed-loop method to improve the zero-rate output (ZRO) stability of amplitude-modulated (AM) capacitive MEMS gyroscopes, even in absence of quadrature compensation electrodes. The method relies on the direct measurement and closed-loop compensation of the variation of the relative phase between the quadrature output, modulated by the drive carrier frequency, and the de...