Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology
IEEE Transactions on Electron Devices(2021)
Abstract
An in-tool, on-wafer detectors’ array for monitoring deep ultraviolet (DUV) light is proposed and demonstrated in this work. The proposed electronic layer detectors array (ELDA) features FinFET CMOS compatibility and compact pixel structure. Its minimum pixel pitch can reach 0.7 $\mu \text{m}$ , enabling the realization of hig...
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Key words
FinFETs,Detectors,Lithography,Arrays,Transistors,Photonics,Electric potential
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