Reliability Characterization on Advanced FinFET Technology
2021 IEEE International Interconnect Technology Conference (IITC)（2021）
Abstract
In this paper, we will report the reliability characterization of advanced FinFET technology which is developed by utilizing EUV. The intrinsic device reliability including HCI, BTI, and TDDB is comparable across FinFET technologies, and would not be degraded by scaling down. The use of EUV single patterning significantly improves reliability variation so that improved reliability lifetime compare...
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Key words
Human computer interaction,Conferences,FinFETs,Reliability
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