Fast Positioning of Zero Path Difference of White Light Interference Based on Image Processing
2021 International Conference of Optical Imaging and Measurement (ICOIM)(2021)
摘要
This topic is based on the image processing method to realize the rapid positioning of the zero path difference of white light interference. The more stable and compact Mirau objective lens is used in the interference light path. The objective lens is driven by a stepping motor to change the size of the optical path difference to obtain interference images at different positions. The interference ...
更多查看译文
关键词
White-light-interference,positioning,image processing,area focusing formatting
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要