A Low Power Bridge-Type Gas Sensor With Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

This paper proposes a ZnO-based gas sensor fabricated entirely by micro-electro-mechanical system (MEMS) process. The gas sensor is based on a narrow bridge-type micro-heater, which achieve ultra-low static power consumption. A physical vapor deposition (PVD) sputtering method was employed in depositing n-type ZnO-based sensing materials on this heater. Ethanol, a common VOC gas was selected as a ...