Structural and optical study of sputtered grown Sb doped ZnO thin film
2021 IEEE 21st International Conference on Nanotechnology (NANO)(2021)
摘要
Sb-ZnO (SZO) thin films were formed on n-Si semiconductor and sapphire by dual ion beam sputtering (DIBS) technique. Structural and optical parameters of SZO sputtered grown film were determined by ellipsometry and field emission scanning electron microscopy (FE-SEM), and I-V analysis of the SZO/n-Si heterojunction device in dark. A smooth film without any grain boundaries is observed in SEM analy...
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关键词
DIBS,SZO,FE-SEM,ellipsometry,ultraviolet,heterojunction
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