Structural and optical study of sputtered grown Sb doped ZnO thin film

Sb-ZnO (SZO) thin films were formed on n-Si semiconductor and sapphire by dual ion beam sputtering (DIBS) technique. Structural and optical parameters of SZO sputtered grown film were determined by ellipsometry and field emission scanning electron microscopy (FE-SEM), and I-V analysis of the SZO/n-Si heterojunction device in dark. A smooth film without any grain boundaries is observed in SEM analy...