All-Directional Dual Pixel Auto Focus Technology in CMOS Image Sensors

2021 Symposium on VLSI Technology(2021)

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摘要
We developed a dual pixel with accurate and all-directional auto focus (AF) performance in CMOS image sensor (CIS). The optimized in-pixel deep trench isolation (DTI) provided accurate AF data and good image quality in the entire image area and over whole visible wavelength range. Furthermore, the horizontal-vertical (HV) dual pixel with the slanted in-pixel DTI enabled the acquisition of all-directional AF information by the conventional dual pixel readout method. These technologies were demonstrated in 1.4μm dual pixel and will be applied to the further shrunken pixels.
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关键词
focus,cmos,all-directional
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