Photonic crystal modulator in a CMOS foundry platform

2021 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC)(2021)

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摘要
We report the first photonic crystal microcavity modulator realized in a foundry CMOS photonics platform. Bandwidth of 2.8 GHz and 5 Gbps data rate demonstrated utilizing an interdigitated p-n junction in a WDM compatible structure. (c) 2021 The Author(s)
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