Monolithic Integration of III-V/Si Hybrid MOS Optical Phase Shifter and InGaAs Membrane Photodetector

Shuhei Ohno,Stéphane Monfray,Frédéric Boeuf,Kasidit Toprasertpong,Shinichi Takagi,Mitsuru Takenaka

2021 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC)（2021）

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摘要

We present proof-of-concept monolithic integration of III-V/Si hybrid MOS optical phase shifter and InGaAs membrane photodetector for Si programmable photonic integrated circuits. We demonstrated responsivity of > 1.0 A/W at O-band owing to avalanche amplification. (C) 2021 The Author(s)

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关键词

(130.3120) Integrated optics devices,(040.0040) Detectors,(230.4110) Modulators

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