Time-Resolved Ion Energy Measurements Using A Retarding Potential Analyzer

A retarding potential energy analyzer was used to obtain temporally resolved ion energy distribution functions (IEDFs) of a flowing laboratory plasma. The plasma of time varying ion energy was generated at 1 and 20 kHz using a commercial gridded ion source and modulated using a wideband power amplifier. Three plasma energy modulation setpoints were tested, and their IEDFs were reconstructed. This method leverages high-speed, low-noise instrumentation to obtain fast collector current measurements at discrete retarding bias levels, recombining them in the time domain using two data fusion techniques. The first method is an empirical transfer function, which determines the linear ratio of complex coefficients in Fourier space. The second method, shadow manifold interpolation, reconstructs the IEDFs point-by-point by comparing input and output datasets in a multi-dimensional phase space. Reconstructed IEDFs from the two methods are presented and compared. The two analysis methods show very good agreement. Published under an exclusive license by AIP Publishing.