Silicon Field Emission Electron Source With Individually Controllable Single Emitters
IEEE Transactions on Electron Devices(2021)
摘要
An electron source with an array of individually controllable single tips allows the observation of each emitter current simultaneously as well as the measurement of the integral current. Furthermore, the initial activation process of the individual tips and current distribution of the source can be examined. The Si cathode consists of an array of $2\tim...
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关键词
Silicon,Current measurement,Voltage measurement,Electron sources,Cathodes,Regulation,Surface emitting lasers
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