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Highly Efficient and Low-Cost Multispectral Photodetector Based on RF Sputtered A-Si/ti Multilayer Structure for Si-photonics Applications

F. Djeffal,N. Boubiche,H. Ferhati,J. Faerber,F. Le Normand, N. Javahiraly,T. Fix

Journal of Alloys and Compounds（2021）

引用 5|浏览15
关键词
Broadband,RF sputtering,Multispectral,Photodetector,A-Si/Ti
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