A Miniature LiDAR With a Detached MEMS Scanner for Micro-Robotics

Light detection and ranging (LiDAR) has been widely used for airborne surveillance and autonomous driving. The ability of robotics or even micro-robotics can be drastically enhanced if equipped with LiDAR, but very light and small LiDAR must be used. Micro-robots have sizes close to birds or insects, and almost all existing LiDAR are too heavy and too large for them. In this work, a novel MEMS LiD...