Materials to Systems Co-Optimization Platform for Rapid Technology Development Targeting Future Generation CMOS Nodes

IEEE Transactions on Electron Devices(2021)

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摘要
Design technology co-optimization (DTCO) has been a workhorse in optimizing logic technology innovations for a few generations now. With increased complexity associated with each new node and the growing number of technological innovations, it is time to expand the conventional DTCO flows. In this article, we present a novel materials to systems co-optimization (MSCO) platform, expanding the bound...
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关键词
Performance evaluation,MOS devices,FinFETs,Dielectrics,Capacitance,Logic gates,Standards
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