Comparison Study of DG-MOSFET with and without Gate Stack Configuration for Biosensor Applications

Silicon(2021)

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摘要
In this Paper, we have studied and compared the performance of two different configurations of simulation model advanced MOSFET devices which can be used for biosensor application. The bio-molecules like protein, biotin, streptavidin, APTES, etc., undergo label free electrical detection with the help of dielectrical modulation technique in order to overcome the limitations of short channel effect in a more efficient way. The bio-molecules trapped inside the cavity region change the electrical parameters of the MOSFET. Biosensors based on MOSFETs have certain issues, like short channel effects (SCEs) and problems related to scaling and power supply. Therefore the proposed device is better withstand to SCEs and can be consider as an alternative for biosensing applications. For channel material, silicon is used for both the configurations i.e. with stack and without stack model and we have also studied the performance of the device based on the analog as well as RF parameters by considering the protein as bio-molecule in the cavity. Two different oxide materials are used to design the device structure such as HfO 2 (K = 25) and SiO 2 (K = 3.9) and for simulation purpose the 2D Sentrausu TCAD simulator has been used. The sensing capability of this proposed dielectric modulated device can be applicable for IOT based applications. They can also be uses in health IOT systems for medical research applications and as bio chip sensor in wearable device so as to study the protein content of the human body.
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关键词
DG-MOSFET,RF behaviors,Gate stack,Biosensor,Analog applications
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