Development Of A Tlp System With A Novel Current Sampling Technique For Esd Protection Applications

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)（2021）

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摘要

This paper presents a TLP test system with a new current sampling method, which has the advantages of simpler structure, higher theoretical bandwidth and higher upper limit of test current. ESD protection properties of both semiconductor and gNEMS devices were tested with the developed TLP testing machine and good testing results are achieved.

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关键词

higher theoretical bandwidth,higher upper limit,test current,ESD protection properties,semiconductor,developed TLP testing machine,good testing results,TLP system,novel current sampling technique,ESD protection applications,TLP test system,current sampling method,simpler structure

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