A Study Of The Electrical And Mechanical Reliability Properties Of Suspended Graphene Nems Devices For Esd Protection Applications

Li Shen, Yaoming Lv,Lele Jiang, Zhenghui Kong,Yu Lu,Qi Chen,Albert Wang,Yuhua Cheng

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)（2021）

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摘要

Recent studies have found that a novel and unique above-IC graphene-based nano-electro-mechanical system (gNEMS) transient switch can be a potential ESD protection. This new ESD switch device is designed by using a suspended graphene membrane structure. In this work, we present experimental investigations and physical insights into the reliability issue and failure mechanism of this graphene ESD device by transient transmission line pulse (TLP) measurement. The mechanical bending evolution and fracture of the graphene membrane via electrostatic actuation assessed with the transient analysis in ESD time scales.

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关键词

nanoelectro- mechanical system transient switch,potential ESD protection,ESD switch device,suspended graphene membrane structure,failure mechanism,transient transmission line pulse measurement,mechanical bending evolution,suspended graphene NEMS devices,electrical and mechanical reliability issue,electrostatic actuation,C

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