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Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers

Sandro G. Koch, Uwe Völz,Nicolas Lange,Sören Köble,Frank Schubert,Christian Richter,Prajith Kumar Poongodan,Frank Vanselow,Christoph Urbahn

2021 Smart Systems Integration (SSI)（2021）

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Abstract
A new technology platform is presented that utilized capacitive micromachined ultrasonic transducers (CMUT) for the on-chip integration of proximity and tactile sensing. This platform integrated in robotic grippers enables tactile and reactive grasping. A single channel proximity system is demonstrated to distinguish objects and reveal high spatial resolution to distances of 10 mm.
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Key words
tactile,proximity,ultrasound,CMUT,robotics
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