Visible Upconversion Luminescence of Doped Bulk Silicon for a Multimodal Wafer Metrology
Boris Afinogenov,Anton N. Sofronov,Ilya M. Antropov,Nikita R. Filatov,Anton S. Medvedev,Alexander S. Shorokhov,Vladimir N. Mantsevich, Natalia S. Maslova,Taehyun Kim,Eunhee Jeang,Ingi Kim,Minhwan Seo,Kyunghun Han,Sangwoo Bae,Wondon Joo,Hosun Yoo,Vladimir O. Bessonov,Andrey A. Fedyanin, Maksim Ryabko,Stanislav Polonsky OPTICS LETTERS（2021）
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