Metrological approach for diagnostics of x-ray refractive lenses

user-5fe1a78c4c775e6ec07359f9(2020)

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摘要
The paper presents a method for metrological studies of the profiles of X-ray refractive lenses using laboratory tomography and phase contrast imaging techniques. The method is based on an algorithm that analyzes images of a refractive lens with a further approximation of the data obtained by a parabola by the least-squares method using regression analysis. The use of regression analysis allows us to evaluate the adequacy of the proposed model of the geometric description of the lens profile, thus ensuring the reliability and repeatability of the measurement results. The developed comprehensive laboratory metrological approach allows you to control the quality of the basic geometric characteristics of refractive lenses and, thus, significantly improve their quality by properly adjusting the production process.
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关键词
Lens (optics),Phase-contrast imaging,Metrology,Reliability (statistics),Repeatability,Optics,Tomography,Quality (physics),Computer science,Refractive lens
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