X-ray reflecto-interferometer based on compound refractive lenses for thin-films study

We are proposing a new X-Ray reflecto-interferometer method based on refractive optics. The focused x-ray beam produced by compound refractive lenses reflected from parallel flat surfaces creates an interference pattern in a wide angular range, which allows you to get information about the sample in one shot. The applicability of this method has been demonstrated at the ESRF ID06 beamline using X-rays from 10 to 20 keV and also using the MetalJet Excillium micro-focus laboratory source, which has GaKα emission line at 9.25 keV. We studied the Si3N4 free-standing membranes of thicknesses with the range from 100 to 1000 nm.