Effect of Growth Temperature on the Characteristics of β-Ga203 Thin Films Grown on 4H-SiC (0001) Substrates by Low Pressure Chemical Vapor Deposition

Herein, we report on $\beta$-Ga$_{\mathbf{2}} \mathbf{O} _{\mathbf{3}}$ thin films grown on 4H-SiC (0001) substrates by Low pressure chemical vapor deposition (LPCVD). The influences of growth temperature on the crystal quality, optical properties, surface morphology of $\beta$-Ga$_{\mathbf{2}} \mathbf{O} _{\mathbf{3}}$ films were investigated using X-ray diffraction (XRD), UltravioletVisible (UV-...