Apparatus and method for measuring electro-mechanical property and microstructure of nano material in stress condition

The invention relates to a device and a method for in-situ measurement of the electro-mechanical property of a nano-meter material in a transmission electron microscope. The invention is characterized in that a sample of the nano-meter material is manufactured by the lithography, and then transferred and fixed onto a bimetallic strip grid; the bimetallic strip is plated with a layer of metallic film as an electrode; the electrode is introduced to a sample holder of the transmission electron microscope with a conducting wire; the bimetallic strip in the grid is subjected to thermal expansion, bending and deformation by heating an insulating ring and electrifying the metallic film, so that the stretching or compressive deformation of the nano-meter material fixed on the bimetallic strip canbe realized, and the correlation between the electro-mechanical property of the nano-meter material in a state of stress and the microstructure can be measured in-situ under the resolution of the atomic lattice. The invention provides the efficient and simple device and the method for in-situ, real-time and dynamic measurement of mechanics-electricity-microstructure correlation of the monomer nano-meter material in the state of stress, in response to the prior dominant Top-Down technology in the semiconductor and information industry.