Improving Piezoelectric Pump Output by Suppressing Liquid Inertial Load with Vibration Filters

This paper proposes to alleviate the high-frequency liquid inertial load in piezoelectric pumps by using a type of vibration filter. Theoretical analyses show that the vibration filter can cut off the rigid connection of the liquid inside and outside the pump chamber and smoothen the high-frequency fluctuation components of liquid flow outside the pump chamber. The effect of the vibration filter o...