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Fabrication of low-loss ring resonators using thick hot-wire CVD SiN films

Koichiro Handa,Shota Sota,Kentaro Furusawa,Kanna Aoki,Norihiko Sekine,Ryoto Yanagisawa,Satomi Ishida, Masahiro Nomura, Satoshi Iwamoto,Takasumi Tanabe

The Japan Society of Applied Physics（2021）

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Key words
Microresonators,Integrated Circuits,Microwave Photonics,Raman Lasers,Frequency Synthesis
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