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基于微米SDOCT的玻璃亚表面缺陷散射系数测量

Wang Changming,Gao Wanrong

Acta Optica Sinica（2021）

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Abstract
用搭建的微米谱域光学相干层析(SDOCT)系统对玻璃亚表面缺陷进行了深度分辨率、非接触、非破坏性测量,并用建立的单次散射模型对得到的断层图像进行计算,得到玻璃亚表面缺陷的散射系数.实验结果表明,利用散射系数可以有效区分玻璃亚表面不同深度的损伤结构.玻璃亚表面散射系数的深度分辨率测量有利于对玻璃亚表面缺陷光学特性的分析,对于精密光学元件的加工和检测具有重要意义.
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Key words
imaging systems, scattering coefficient, glass subsurface defects, single scattering model, damage structure
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