Photochemical fate of sulfonium photoacid generator cations under photolithography relevant UV irradiation

Xi-Zhi Niu,Richard D. Pepel,Rodrigo Paniego,Jim A. Field,Jon Chorover,Leif Abrell,A. Eduardo Sáez,Reyes Sierra-Alvarez

Journal of Photochemistry and Photobiology A: Chemistry（2021）

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摘要

•Rapid photoreactions of onium photoacid generators under 254 nm irradiation.•Multiple aromatic and hydrophobic photoproducts identified by HPLC-DAD or GC-MS.•Low recoveries of the reactions obtained due to analytical limitations and lack of standards.•Environmental implications of onium photochemistry discussed.

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关键词

Photoacid generators,Photolithography,Sulfonium,Thiophenium,Photolysis,UV photoproducts

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