Optical Constants Of Beryllium Thin Layers Determined From Mo/Be Multilayers In Spectral Range 90 To 134 Ev

Mo/Be multilayers are promising optical elements for extreme ultraviolet (EUV) lithography and space optics. Experimentally derived optical constants are necessary for accurate and reliable design of beryllium-containing optical coatings. We report optical constants of beryllium derived from synchrotron radiation-based reflectivity data of Mo/Be multilayers. Results are in good agreement with available data in the literature obtained from the well-known absorption measurements of beryllium thin films or foils. We demonstrate synchrotron based at-wavelength reflectometry as an accurate and non-destructive technique for deriving EUV optical constants for materials that are difficult or unstable to make thin foils for absorption measurements. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.