Hot Electron Source Side Injection Comprehension in 40nm eSTM™
2021 IEEE International Memory Workshop (IMW)(2021)
摘要
In this paper, we detail an experimental study of the hot electron Source Side Injection programming operation of the embedded Select in Trench Memory (eSTM™) cell. A complete set of electrical characterizations is carried out. A focus on the Select Gate bias to improve the programming window and the consumption is reported. Moreover, the impact of the Sense-to-Select distance, on the memory behav...
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关键词
Degradation,Energy consumption,Current measurement,Conferences,Programming,Logic gates,Electron sources
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