High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever With Two Groups of Segmented Electrodes

Dongsheng Li,Hanyong Dong,Zihao Xie,Qian Zhang,Mengjiao Qu,Yongqing Fu,Jin Xie

IEEE Electron Device Letters（2021）

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摘要

Resonant cantilever based on piezoelectric materials is one of the most promising platforms for real-time humidity sensing. In this letter, we propose a humidity sensor based on an AlN piezoelectric microcantilever with a high-order resonant mode and a sensing layer of MoS2. The top electrode of cantilever is designed into two groups of segmented electrodes in order to achieve a high intensity of ...

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关键词

Humidity,Resonant frequency,Electrodes,Sensitivity,Sensors,III-V semiconductor materials,Aluminum nitride

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