In-situ Plasma Studies Using a Direct Current Microplasma in a Scanning Electron Microscope

Lukas Grunewald,Dmitry Chezganov,Robin De Meyer,Andrey Orekhov,Sandra Van Aert,Annemie Bogaerts,Sara Bals,Jo Verbeeck

Advanced Materials Technologies（2024）

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energy-dispersive X-ray spectroscopy,environmental scanning electron microscopy,in situ scanning electron microscopy,microplasma,plasma,scanning electron microscopy,sputtering

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