Elastic recoil detection analysis of {alpha}-Si{sub 1-x}C{sub x}:H thin films

Elastic recoil detection analysis of {alpha}-Si{sub 1-x}C{sub x}:H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality {sup 127}I beam bombards the target of {alpha}-Si{sub 1-x}C{sub x}:H thin film. A {delta}E(gas)-E(PSD) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30 degree in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation. (authors)