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Controlling the Surface Roughness of Surface-Electrode Ion Trap Based on Micro-Nano Fabrication

Yizhu Hou,Xinfang Zhang,Wei Wu,Ting Zhang,Pingxing Chen,Zhijiao Deng

COATINGS（2021）

Cited 4|Views17
Key words
surface-electrode ion trap,micro-nano fabrication,thick film,surface roughness
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