Enabling Precision Coordinate Metrology for Universal Optical Testing and Alignment Applications

Manal Khreishi,Raymond G. Ohl,Joseph M. Howard,Jonathan C. Papa,Ryan Mcclelland,Clark Hovis,Theodore Hadjimichael,Patrick Thompson, Kenneth Ranson,Rongguang Liang,Nicolas Gorius

Optical Engineering（2021）

引用 5|浏览13

关键词

optical metrology,optical shop testing,universal optical testing,freeform,aspheric,large convex,grazing incidence,coordinate measuring machine,Precitec probe,optical alignment

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