Microfabrication, Coil Characterization, and Hermetic Packaging of Millimeter-Sized Free-Floating Neural Probes

Pyungwoo Yeon,Sreejith Kochupurackal Rajan,Jessica Falcone,Joe L. Gonzalez,Gary S. May,Ravi V. Bellamkonda,Oliver Brand,Muhannad S. Bakir,Maysam Ghovanloo

IEEE Sensors Journal（2021）

引用 6|浏览11

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摘要

This paper presents a new micromachining (MEMS) fabrication, microassembly, and hermetic packaging process for free-floating neural probes (<1 mm3). It offers an intuitive probe assembly and a robust design against mechanical and material failures. A key component of the pushpin neural probe is a $1.3\times1.3$ mm2 bath-tub shaped micromachined silicon die, which serves as a substrate that suppo...

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关键词

Probes,Electrodes,Silicon,Implants,Packaging,Capacitors,Wireless communication

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