Bioinspired liquid metal based sensing system for compliance detection
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)(2021)
Abstract
In this paper, we report a fully stretchable liquid metal based sensor system for compliance detection. The system is composed of a strain sensor layer, a gap layer with a hole in the center and a pressure sensor layer from top to bottom. Inspired from the human tactile system, the pressure sensor and strain sensor work collaboratively to detect the force and deformation simultaneously, from which the compliance of the contact material can be derived.
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Key words
Liquid metal,stretchable sensor system,thin film,multi-modal sensing
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