A High Response Three-Dimensional Ag Nanoparticles/Rgo Microtubular Field Effect Transistor Sensor For No2 Detections

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)(2021)

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Abstract
In this paper, a three-dimensional (3D) microtubular reduced graphene oxide (rGO) FET sensor, decorated with silver nanoparticles (Ag NPs) has been fabricated and demonstrated for NO2 detections. The performance of our planar 2D sensor and 3D microtubular sensors with different numbers of winding were compared and contrasted. The preliminary results shown that our 3D microtubular Ag NPs/rGO FET sensor with 2 windings exhibits a sensor response of 8.17 % to 10 part per million (ppm) NO2 at room temperature. This 3D microtubular concept and study provide a new approach for highly integrated and miniaturized hazardous gases sensing applications for health and safety detections, enviromnental monitoring and beyond.
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Key words
3D gas sensor, 3D Ag NPs/rGO FET sensor, MEMS gas sensor, NO2 detections
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