Manufacturability Of Highly Densed Arrays Of Sc 20% Doped Aln Monolithic Pmut

Eloi Marigo, Muhammad Nur Azuan, Anis Amiera,Loh Annie, Nor Shazwani, Chan Buan Fei,Mohanraj Soundara-Pandian

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)（2021）

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摘要

The focus of this paper is to present a comparative study for highly dense arrays of Piezoelectric Micromachined Ultrasonic Transducers (PMUT), manufactured using a Aluminium Nitride (AN) and emerging Aluminium Scandium Nitride (Al20%ScN) thin films. Monolithic PMUT manufacturing method is used to fabricate the devices. A 100 x 100um array of PMUT, each unit cell has 40 mu m cavity and the pitch is 57 mu m, is designed as a test vehicle to monitor the process performance of these two films.

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关键词

Piezoelectric Microelectromechanical Systems, Complementary Metal Oxide Semiconductor - Microelectromechanical Systems Manufacturing, Aluminium Scandium Nitride, Piezoelectric Micromachined Ultrasonic Transducers

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