Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Etching with Electron Beam-Generated Plasmas: Selectivity Versus Ion Energy in Silicon-Based Films

S. G. Walton,D. R. Boris,S. G. Rosenberg,H. Miyazoe,E. A. Joseph,S. U. Engelmann

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films（2021）

Cited 11|Views29
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined