Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests
IEEE Electron Device Letters（2021）
Key words
Humidity,Capacitors,Thermistors,Sensitivity,Temperature sensors,Temperature measurement,Sensors,Nanoforests,high sensitivity,MEMS,humidity sensors
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined