Study of Nanowire-based Integrated Via Technology for CMOS Application in Millimeter-Wave Frequencies

This work shows a novel integrated via structure based on 1.2- $\mu \text{m}$ thick copper nanowires (NWs) for use in CMOS applications at millimeter-wave frequencies. Coplanar waveguide (CPW) lines are fabricated on a 5000- $\Omega $ -cm high-resistivity silicon wafer and connected by NW vias that are grown in integrated anodized alumina oxide (AAO). The AAO layer is fabricated by anodizing an e...