Experimental investigation of the effects of vibration parameters on ultrasonic vibration-assisted tip-based nanofabrication

•The experimental investigation of effects of key vibration parameters including vibration mode, frequency, and amplitude in vibration-assisted tip-based nanofabrication (VTBN) is presented.•The experiments are conducted with a self-developed 3D ultrasonic VTBN system, which mainly consists of a tip displacement detection system, a 3-DOF nano-positioner, and a 3D ultrasonic vibration platform.•To analyze the specific effects, the experiments are elaborately designed with the general factorial method.•The experiments results show that the effects of three parameters are all significant factors of the responses of single scratch in VTBN process.•The maximum error for the depth and the width of the established model is less than 8%, which validates the effectiveness of this method.