Analytical Design and Experimental Verification of Lateral Superjunction Based on Global Region Normalization Method

The global region normalization (GRN) method is proposed to optimize the lateral superjunction (SJ), in this article. The GRN features normalizations in the global doping range of the SJ from zero to the maximum doping concentration ${N}_{\text {max}}$ that was theoretically determined by the pillar width ${W}_{\text {SJ}}$ . Then the optimization covers all the possible design points of the SJ...