NH 4 OH-B Silicon Texturing of Periodic V-Groove Channels, Upright, and Inverted Pyramids Structures

Hugo S. Alvarez,Audrey R. Silva,Luana C. J. Espínola,Alfredo R. Vaz,José A. Diniz

IEEE Journal of Photovoltaics（2021）

Cited 2|Views3

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Abstract

Periodic V-grooves channels, upright, and inverted pyramids structures were texturized on monocrystalline silicon (c-Si) substrates using ammonium hydroxide (NH4OH) solution. This cheap and CMOS compatible etching solution aims at the integration of circuits with photovoltaic (PV) cells for monolithic purposes. To obtain these structures, lithographed silicon dioxide (SiO2) patterns were used to d...

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Key words

Silicon,Etching,Surface texture,Periodic structures,Substrates,Optical imaging,Wavelength measurement

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