Toward scalable spin qubits: Si/SiGe quantum dot devices built on a 300mm process line
Brennen Mueller,Bojarski Stephanie A,Hubert C. George,Eric R. Henry, Otto Zietz,Samuel F. Neyens,Thomas F. Watson,Rambert Nahm,Payam Amin,Roman Caudillo,Ravi Pillarisetty,Roza Kotlyar,Lampert Lester,F. Luthi, Jessica M. Torres,Jeanette M. Roberts,James S. Clarke Bulletin of the American Physical Society（2021）
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