Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet
JOURNAL OF STRUCTURAL CHEMISTRY(2021)
摘要
We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.
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关键词
diamond coatings, chemical vapor deposition, microwave plasma, gas jet method, scanning electron microscopy, Raman spectroscopy, NEXAFS, XPS
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