Silicon Dioxide Deposited Using Atmospheric Pressure Plasma Chemical Vapor Deposition For Improved Adhesion And Water Intrusion Resistance For Lightweight Manufacturing

SURFACES AND INTERFACES(2021)

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摘要
This work aims to demonstrate the barrier coating, and adhesion promoting properties of silica-based coatings deposited using an atmospheric pressure plasma torch (APPT). This is achieved by applying an industrial grade adhesive to silica thin films deposited, on the surfaces to be joined, using atmospheric pressure plasma chemical vapor deposition (APP-CVD), to make single joint lap shear samples of different metal combinations commonly found in lightweight manufacturing, such as aluminum and magnesium as well as steel. To deposit these thin films, two separate silicon based organic precursors, hexamethyldisiloxane (HMDSO), and tetraehylorthosilicate (TEOS), are used. Samples are bonded using DuPont Betamate 1486 adhesive, and the lap shear results for these films are compared to the lap shear results of a chemically cleaned control using the same adhesive. The APPT uses a microwave power supply and gas mixtures of N-2 and Ar. The adhesion of the films are tested using lap shear, and elevated temperature water soaks are conducted on the joints as well to simulate environmental exposure. Lap shear results, from samples with silica thin films, have an increase of max shear stress of 25%-115% compared to control samples depending on material. After exposure to water soak the max shear strength of the joints decreased by less than 15%, which demonstrates the films capabilities as a water barrier. Film morphology is examined using Scanning Electron Microscopy (SEM), and the film's composition and approximate thickness are obtained using Rutherford Backscattering Spectroscopy (RBS).
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关键词
Atmospheric pressure plasma, chemical vapor deposition, silicon oxide, lap shear strength, barrier coating
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