Electron Collision Cross Section Set For N-2 And Electron Transport In N-2, N-2/He, And N-2/Ar

PLASMA SOURCES SCIENCE & TECHNOLOGY(2021)

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摘要
Electron collision cross section set for N-2 is proposed. The proposed set consists of vibrational elastic momentum transfer cross section and cross sections for 31 rotational excitation, 29 rotational deexcitation, 10 vibrational excitation, 17 electronic excitation, 2 neutral dissociation, and 5 ionization collision processes. Electron transport coefficients in N-2, N-2/He, and N-2/Ar are calculated by Monte Carlo method with considering anisotropic inelastic electron scattering and partitioning of the residual energy after the ionization collision on the basis of experimental results. The reliability of the proposed electron collision cross section set is demonstrated by comparing the calculated and measured electron transport coefficients in a wide range of reduced electric fields, E/N (E: electric field strength, N: number density of gas molecules). Comparison of the values of the electron transport coefficients in N-2 calculated from eight individual cross section sets partly provided on LXCat with the measured values is also carried out. Furthermore, the effect of anisotropic inelastic electron scattering on the electron transport coefficients is examined. The electron transport coefficients in N-2 are found to be affected by considering anisotropic electron scattering with increasing E/N values, and the longitudinal third-order transport coefficient is found to be sensitive to considering anisotropic electron scattering even at middle E/N values.
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关键词
electron collision cross section, Monte Carlo method, electron transport coefficient
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