A Solidly Mounted Resonator Fabricated by LiNbO3 Single Crystalline Film on Flexible Polyimide Substrate.

Shitian Huang,Wenbo Luo,Xiaoyuan Bai,Lu Lv,Xinqiang Pan,Yao Shuai,Chuangui Wu,Wanli Zhang

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2021）

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摘要

A solidly mounted resonator on flexible polyimide (PI) substrate with high-effective coupling coefficient ( ${K}_{t}^{{2}}$ ) of 14.06% is reported in this article. This high ${K}_{t}^{{2}}$ is resulting from the LiNbO3 (LN) single-crystalline film and [SiO2/Mo]3 Bragg reflector. The quality of LN film fabricated by the crystal-ion-slicing (CIS) technique using benzocyclobutene (BCB) bonding lay...

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关键词

Film bulk acoustic resonators,Substrates,Electrodes,Acoustics,Polyimides,Impedance,Frequency measurement

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