三氯氢硅中硼、磷含量检验方法研究
Inner Mongolia Scientech and Economy（2012）
Abstract
建立三氯氢硅中硼、磷含量电感耦舍等离子体发射光谱检验方法。该方法中硼的标准样品加入回收率为94．40％～100．80％；磷的标准样品加入回收率为91．20％～93．60％。
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